TY  - CONF
AU  - Richard Allen
AU  - Rathindra Ghoshtagore
C2  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
DA  - 1998-12-31 00:12:00
LA  - en
PB  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
PY  - 1998
TI  - Evaluation of Surface Depletion Effects in Single-Crystal Test Structures for Reference Materials Applications
ER  -