TY  - CONF
AU  - Alain Diebold
AU  - David Wollman
AU  - Kent Irwin
AU  - John Martinis
AU  - B. Liu
C2  - Proc., Fourth Intl. Symp. on Ultra Clean Processing of Silicon Surfaces (UCPSS'98), Ostend, 1, SW
DA  - 1998-09-01 00:09:00
LA  - en
PB  - Proc., Fourth Intl. Symp. on Ultra Clean Processing of Silicon Surfaces (UCPSS'98), Ostend, 1, SW
PY  - 1998
TI  - Application of Microcalorimeter EDS X-Ray Detectors to Particle Analysis
ER  -