TY - GEN AU - Jon Geist AU - Barbara Belzer AU - M. Miller AU - Peter Roitman C2 - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD DA - 1992-04-30 00:04:00 LA - en PB - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD PY - 1992 TI - Optical Calibration of a Submicrometer Magnification Standard ER -