TY  - JOUR
AU  - Paul Rice
AU  - John Moreland
C2  - Journal of Vacuum Science and Technology B
DA  - 1994-08-01 00:08:00
LA  - en
M1  - 12(4)
PB  - Journal of Vacuum Science and Technology B
PY  - 1994
TI  - Flexible-Diaphragm Force Microscope
ER  -