TY  - GEN
AU  - Ya-Shian Li-Baboud
AU  - Brad Van Eck
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2004-02-25 00:02:00
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2004
TI  - Semiconductor Factory and Equipment Time Synchronization
ER  -