TY  - JOUR
AU  - Eric Vogel
AU  - Monica Edelstein
AU  - John Suehle
C2  - Journal of Applied Physics
DA  - 2001-09-01 00:09:00
LA  - en
M1  - 90
PB  - Journal of Applied Physics
PY  - 2001
TI  - Defect Generation and Breakdown of Ultra-Thin Silicon Dioxide Induced by Substrate Hot Hole Injection
ER  -