TY  - JOUR
AU  - Loucas Christophorou
AU  - James Olthoff
C2  - Elsevier Science B.V.
DA  - 2002-09-09 00:09:00
LA  - en
PB  - Elsevier Science B.V.
PY  - 2002
TI  - Electron Interactions with Plasma Processing Gases: Present Status and Future Needs
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=30830
ER  -