TY  - JOUR
AU  - Michael Postek
AU  - Robert Larrabee
AU  - William Keery
C2  - IEEE Transactions on Electron Devices
DA  - 1989-11-01 00:11:00
LA  - en
M1  - 36
PB  - IEEE Transactions on Electron Devices
PY  - 1989
TI  - A New Approach to Accurate X-Ray Mask Measurements in a Scanning Electron Microscope
ER  -