TY  - GEN
AU  - Stephen Knight
AU  - Joaquin Martinez
AU  - Barbara Belzer
AU  - Michele Buckley
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2001-04-06 00:04:00
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2001
TI  - Silicon Microelectronics Programs at the National Institute of Standards and Technology - Programs, Activities, and Accomplishments
ER  -