TY  - JOUR
AU  - Martin Misakian
AU  - Yicheng Wang
C2  - Journal of Applied Physics
DA  - 2000-04-01 00:04:00
LA  - en
M1  - 87
PB  - Journal of Applied Physics
PY  - 2000
TI  - Calculation of Ion Energy Distributions from Radio Frequency Plasmas Using a Simplified Kinetic Approach
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=10504
ER  -