TY  - GEN
AU  - Stephen Knight
AU  - Joaquin Martinez
AU  - Michele Buckley
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2005-01-01 00:01:00
DO  - https://doi.org/10.6028/NIST.ir.7171
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2005
TI  - Office of Microelectronics Programs - Programs, Activities, and Accomplishments
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31836
ER  -