TY - CONF AU - Mechels, S. AU - Young, M. C2 - Proc., SPIE, Biomedical Image Processing and Three-Dimensional Microscopy, Undefined DA - 1992-01-01 00:01:00 LA - en M1 - 1660 PB - Proc., SPIE, Biomedical Image Processing and Three-Dimensional Microscopy, Undefined PY - 1992 TI - Scanning Confocal Microscope for Accurate Dimensional Measurement ER -