TY - GEN AU - Knight, Stephen AU - Settle-Raskin, A C2 - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD DA - 1999-05-01 00:05:00 LA - en PB - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD PY - 1999 TI - The National Semiconductor Metrology Program, Project Portfolio, FY 1999 ER -