TY  - JOUR
AU  - Santos Mayo
AU  - John Suehle
AU  - Peter Roitman
C2  - Journal of Applied Physics
DA  - 1993-09-01 00:09:00
LA  - en
PB  - Journal of Applied Physics
PY  - 1993
TI  - Breakdown Mechanism in Buried Silicon Oxide Films
ER  -