TY  - CONF
AU  - Richard Allen
AU  - O. Oyebanjo
AU  - Michael Cresswell
AU  - Loren Linholm
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Kanazawa, 1, JA
DA  - 1998-03-01 00:03:00
LA  - en
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Kanazawa, 1, JA
PY  - 1998
TI  - Temperature Dependence of the Modulation of Electrical Llinewidth of Single-Crystal Critical Dimension Artifacts
ER  -