TY  - GEN
AU  - W. Gladden
AU  - D. Baghdadi
AU  - S. Slaughter
AU  - William Duncan
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1988-12-01 00:12:00
LA  - en
M1  - 400
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1988
TI  - Semiconductor Measurement Technology: Automatic Determination of the Interstitial Oxygen Content of Silicon Wafers Polished on Both Sides
ER  -