TY  - CONF
AU  - Duncan McBride
AU  - Joseph Kopanski
C2  - Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
DA  - 2001-02-01 00:02:00
LA  - en
PB  - Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
PY  - 2001
TI  - Gate Oxide Formation under Mild Conditions for Scanning Capacitance Microscopy
ER  -