TY  - JOUR
AU  - Robert Dragoset
AU  - Theodore Vorburger
C2  - SPIE, Metrology Figure and Finish
DA  - 1987-01-01 00:01:00
LA  - en
M1  - 749
PB  - SPIE, Metrology Figure and Finish
PY  - 1987
TI  - Scanning Tunneling Microscopy (STM) of a Diamond-turned Surface and a Grating Replica
ER  -