TY  - SER
AU  - David Read
AU  - Alex Volinsky
C2  - Kluwer, 
DA  - 2007-01-01 00:01:00
LA  - en
PB  - Kluwer, 
PY  - 2007
TI  - Thin Films for Microelectronics and Photonics: Physics, Mechanics, Characterization, and Reliability
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50201
ER  -