TY - CONF AU - Herbert Bandy AU - David Gilsinn C2 - Proceedings of the SPIE Conference on Modeling Simulation (and Control Technologies for Manufacturing), Philadelphia, PA, USA DA - 1995-01-01 00:01:00 LA - en M1 - Vol.2596 PB - Proceedings of the SPIE Conference on Modeling Simulation (and Control Technologies for Manufacturing), Philadelphia, PA, USA PY - 1995 TI - Data Management for Error Compensation and Process Control ER -