TY - CONF AU - Hyeung-Sik Min AU - Albert Jones AU - Yuehwern Yih C2 - Proceedings of the International Conference on Product Research, , USA DA - 2003-04-01 00:04:00 LA - en PB - Proceedings of the International Conference on Product Research, , USA PY - 2003 TI - Toward a Real-time Scheduler and Controller for Semiconductor Fabrication Systems UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=821979 ER -