TY  - CONF
AU  - Min, Hyeung-Sik
AU  - Jones, Albert
AU  - Yih, Yuehwern
C2  - Proceedings of the International Conference on Product Research, , USA
DA  - 2003-04-01 00:04:00
LA  - en
PB  - Proceedings of the International Conference on Product Research, , USA
PY  - 2003
TI  - Toward a Real-time Scheduler and Controller for Semiconductor Fabrication Systems
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=821979
ER  -