TY  - JOUR
AU  - Tanuma, Shigeo
AU  - Powell, Cedric
AU  - Penn, David
C2  - Journal of Vacuum Science and Technology
DA  - 1988-05-01 00:05:00
LA  - en
M1  - A6
PB  - Journal of Vacuum Science and Technology
PY  - 1988
TI  - Dependence of inelastic electron mean free paths on electron energy and material
ER  -