TY - JOUR AU - Tanuma, Shigeo AU - Powell, Cedric AU - Penn, David C2 - Journal of Vacuum Science and Technology DA - 1988-05-01 00:05:00 LA - en M1 - A6 PB - Journal of Vacuum Science and Technology PY - 1988 TI - Dependence of inelastic electron mean free paths on electron energy and material ER -