TY - JOUR AU - Shigeo Tanuma AU - Cedric Powell AU - David Penn C2 - Journal of Vacuum Science and Technology DA - 1988-05-01 00:05:00 LA - en M1 - A6 PB - Journal of Vacuum Science and Technology PY - 1988 TI - Dependence of inelastic electron mean free paths on electron energy and material ER -