TY  - JOUR
AU  - David Read
AU  - Robert Keller
AU  - Nicholas Barbosa
AU  - Roy Geiss
C2  - Metal. Mater. Trans.
DA  - 2007-01-01 00:01:00
LA  - en
PB  - Metal. Mater. Trans.
PY  - 2007
TI  - Results of a Nanoindentation Round Robin on Thin Film Copper on Silicon
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50334
ER  -