TY - JOUR AU - Robert Celotta AU - R Gupta AU - R Scholten AU - Jabez McClelland C2 - Journal of Applied Physics DA - 1996-04-15 00:04:00 LA - en M1 - 79 PB - Journal of Applied Physics PY - 1996 TI - Nanostructure Fabrication via Laser-Focused Atomic Deposition ER -