TY - JOUR AU - Michael Cresswell AU - Robert Allen AU - L Linholm AU - William Guthrie AU - William Penzes AU - A Gurnell C2 - IEEE Transactions on Semiconductor Manufacturing DA - 1997-01-01 00:01:00 LA - en M1 - 10(2) PB - IEEE Transactions on Semiconductor Manufacturing PY - 1997 TI - Hybrid Optical-Electrical Overlay Test Structure ER -