TY  - JOUR
AU  - John Dagata
AU  - T Inoue
AU  - J Itoh
AU  - H Yokoyama
C2  - Applied Physics Letters
DA  - 1998-01-01 00:01:00
LA  - en
M1  - 73(2)
PB  - Applied Physics Letters
PY  - 1998
TI  - Understanding Scanned Probe Oxidation of Silicon
ER  -