TY  - CONF
AU  - R Koning
AU  - Ronald Dixson
AU  - Joseph Fu
AU  - V Tsai
AU  - Theodore Vorburger
AU  - Edwin Williams
AU  - X Wang
C2  - Proceedings of 2nd Seminar on Quantitative Microscopy, , PTB Report F-30, K. Hasche, W. Mirande, and G. Wilkening, Editors, PTB Braunschweig, 1, GE
DA  - 1997-01-01 00:01:00
LA  - en
PB  - Proceedings of 2nd Seminar on Quantitative Microscopy, , PTB Report F-30, K. Hasche, W. Mirande, and G. Wilkening, Editors, PTB Braunschweig, 1, GE
PY  - 1997
TI  - Pitch and Step Height Measurements Using NIST
ER  -