TY - CONF AU - J Schneir AU - T Mcwaid AU - Theodore Vorburger C2 - Proceedings of SPIE, San Jose, CA, USA DA - 1994-05-01 00:05:00 LA - en M1 - 2196 PB - Proceedings of SPIE, San Jose, CA, USA PY - 1994 TI - An Instrument for Calibrating Atomic Force Microscope Standards ER -