TY - JOUR AU - Jihui Yang AU - Joseph Kopanski AU - A Postula AU - M Bialkowski C2 - Microelectronics Reliability DA - 2004-12-20 00:12:00 LA - en M1 - 45 PB - Microelectronics Reliability PY - 2004 TI - Experimental investigation of the dielectric-semiconductor interface with scanning capacitance microscopy UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31737 ER -