TY - CONF AU - Gyoung Buh AU - Chi Tran AU - Joseph Kopanski C2 - Proc., Seventh USJ, Santa Cruz, CA, USA DA - 2003-04-27 00:04:00 LA - en PB - Proc., Seventh USJ, Santa Cruz, CA, USA PY - 2003 TI - PSPICE Analysis of the Scanning Capacitance Microscope Sensor ER -