TY - GEN AU - Emre Yarimbiyik AU - Harry Schafft AU - Richard Allen AU - Mona Zahgoul AU - David Blackburn C2 - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD DA - 2006-02-01 00:02:00 DO - https://doi.org/10.6028/NIST.IR.7234 LA - en PB - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD PY - 2006 TI - Implementation of Simulation Program for Modeling the Effective Resistivity of Nanometer Scale Film and Line Interconnects UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32006 ER -