TY - JOUR AU - Gyoung Buh AU - Joseph Kopanski AU - Jay Marchiando AU - Anthony Birdwell AU - Young Kuk C2 - Journal of Applied Physics DA - 2003-08-15 00:08:00 LA - en M1 - 94 PB - Journal of Applied Physics PY - 2003 TI - Factors Influencing the Capacitance-voltage Characteristics Measured by the Scanning Capacitance Microscope ER -