TY  - JOUR
AU  - Buh, Gyoung
AU  - Kopanski, Joseph
AU  - Marchiando, Jay
AU  - Birdwell, Anthony
AU  - Kuk, Young
C2  - Journal of Applied Physics
DA  - 2003-08-15 00:08:00
LA  - en
M1  - 94
PB  - Journal of Applied Physics
PY  - 2003
TI  - Factors Influencing the Capacitance-voltage Characteristics Measured by the Scanning Capacitance Microscope
ER  -