TY  - JOUR
AU  - Jonathan Guyer
AU  - W. Tseng
AU  - Joseph Pellegrino
C2  - Journal of Vacuum Science and Technology
DA  - 2000-09-29 00:09:00
LA  - en
PB  - Journal of Vacuum Science and Technology
PY  - 2000
TI  - Diffuse Reflectance Spectroscopy for In Situ Process Monitoring and Control During Molecular Beam Epitaxy Growth of InGaAs Pseudomorphic High Electron Mobility Transistors
ER  -