TY  - JOUR
AU  - T Keller
AU  - Alexana Roshko
AU  - R.H. Geiss
AU  - Kristine Bertness
AU  - T.P. Quinn
C2  - Microelectronics Engineering
DA  - 2004-02-27 00:02:00
LA  - en
M1  - 75
PB  - Microelectronics Engineering
PY  - 2004
TI  - EBSD Measurement of Strains in GaAs due to Oxidation of Buried AlGaAs Layers
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31470
ER  -