TY  - JOUR
AU  - Rolf Jaeger
AU  - Jesus Del Alamo
AU  - Masumi Fukuta
AU  - Herbert Bennett
AU  - Christopher Snowden
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2003-08-01 00:08:00
LA  - en
M1  - 16
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2003
TI  - Special Section on Compound Semiconductor Microelectronics Manufacturing: The Future Is Here
ER  -