TY  - JOUR
AU  - Richard Allen
AU  - Michael Cresswell
AU  - Loren Linholm
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2004-05-01 00:05:00
LA  - en
M1  - 17
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2004
TI  - Junction-Isolated Electrical Test Structures for Critical Dimension Calibration Standards
ER  -