TY  - CONF
AU  - Loucas Christophorou
AU  - James Olthoff
C2  - Characterization and Metrology for ULSI Technology, Gaithersburg, MD
DA  - 1998-12-01 00:12:00
LA  - en
PB  - Characterization and Metrology for ULSI Technology, Gaithersburg, MD
PY  - 1998
TI  - Applications of Electron-Interaction Reference Data to the Semiconductor Industry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=6001
ER  -