TY - CONF
AU - Christophorou, Loucas
AU - Olthoff, James
C2 - Conf. Proc. Symposium on Atomic and Surface Physics and Related Topics, Going, 1, AU
DA - 1998-01-01 00:01:00
LA - en
PB - Conf. Proc. Symposium on Atomic and Surface Physics and Related Topics, Going, 1, AU
PY - 1998
TI - Electron Interactions With Plasma Processing Gases: CF4, CHF3, C2F6, and C3F8
UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16418
ER -