TY  - CONF
AU  - Loucas Christophorou
AU  - James Olthoff
C2  - Conf. Proc. Symposium on Atomic and Surface Physics and Related Topics, Going, 1, AU
DA  - 1998-01-01 00:01:00
LA  - en
PB  - Conf. Proc. Symposium on Atomic and Surface Physics and Related Topics, Going, 1, AU
PY  - 1998
TI  - Electron Interactions With Plasma Processing Gases: CF<sub>4</sub>, CHF<sub>3</sub>, C<sub>2</sub>F<sub>6</sub>, and C<sub>3</sub>F<sub>8</sub>
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16418
ER  -