TY  - CONF
AU  - Michael Postek
AU  - William Keery
AU  - S. Jones
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control III, Los Angeles, CA, USA
DA  - 1989-12-31 00:12:00
LA  - en
M1  - 1087
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control III, Los Angeles, CA, USA
PY  - 1989
TI  - Metrological Electron Microscope for the Certification of Magnification and Linewidth Artifacts for the Semiconductor Industry
ER  -