TY  - CONF
AU  - J Lowney
AU  - Andras Vladar
AU  - Michael Postek
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Metrology Inspection and Process Control for Microlithography X, Santa Clara, CA, USA
DA  - 1996-12-31 00:12:00
LA  - en
M1  - 2725
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Metrology Inspection and Process Control for Microlithography X, Santa Clara, CA, USA
PY  - 1996
TI  - High-Accuracy Critical-Dimension Metrology Using a Scanning Electron Microscope
ER  -