TY  - CONF
AU  - E Teague
AU  - Loren Linholm
AU  - Michael Cresswell
AU  - William Penzes
AU  - John Kramar
AU  - Fredric Scire
AU  - John Villarrubia
AU  - Jay Jun
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Sitges, 1, SP
DA  - 1993-12-31 00:12:00
LA  - en
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Sitges, 1, SP
PY  - 1993
TI  - Metrology Standards For Advanced Semiconductor Lithography Referenced to Atomic Spacings and Geometry
ER  -