TY - CONF AU - Roitman, Peter AU - Davis, G. C2 - Proc., 22nd Annual Conference, Materials Analysis Society, Milwaukee, WI, USA DA - 1988-12-31 00:12:00 LA - en PB - Proc., 22nd Annual Conference, Materials Analysis Society, Milwaukee, WI, USA PY - 1988 TI - Selected Area channeling Pattern and Defect Etch Study of Silicon Implanted with Oxygen, MIcrobeam Analysis - 1988 ER -