TY  - CONF
AU  - Lee, J.
AU  - Park, J
AU  - Venables, D.
AU  - Krause, S.
AU  - Roitman, Peter
C2  - Proc., Materials Research Society Symposium, Boston, MA, USA
DA  - 1994-12-31 00:12:00
LA  - en
M1  - 316
PB  - Proc., Materials Research Society Symposium, Boston, MA, USA
PY  - 1994
TI  - Defect Pair Formation by Implantation-Induced Stresses In High-Dose-Oxygen-Implanted-Silicon
ER  -