TY  - CONF
AU  - G. Neubauer
AU  - A. Erickson
AU  - C. Williams
AU  - Joseph Kopanski
AU  - M. Rodgers
AU  - D. Adderton
C2  - Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA
DA  - 1995-12-31 00:12:00
LA  - en
PB  - Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA
PY  - 1995
TI  - 2D-Scanning Capacitance Microscopy Measurement of Cross-Sectional VLSI Test Structures
ER  -