TY  - CONF
AU  - Neubauer, G.
AU  - Erickson, A.
AU  - Williams, C.
AU  - Kopanski, Joseph
AU  - Rodgers, M.
AU  - Adderton, D.
C2  - Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA
DA  - 1995-12-31 00:12:00
LA  - en
PB  - Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA
PY  - 1995
TI  - 2D-Scanning Capacitance Microscopy Measurement of Cross-Sectional VLSI Test Structures
ER  -