TY  - JOUR
AU  - Richard Allen
AU  - T Headley
AU  - Sarah Everist
AU  - Rathindra Ghoshtagore
AU  - Michael Cresswell
AU  - Loren Linholm
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2001-02-01 00:02:00
LA  - en
M1  - 14
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2001
TI  - High-Resolution Transmission Electron Microscopy Calibration of Critical Dimension Reference Materials
ER  -