TY  - CONF
AU  - Kristine Bertness
AU  - S. Hays
AU  - Robert Hickernell
C2  - Proc., Mat. Res. Soc. Symp. on Epitaxial Growth-Principles and Applications, San Francisco, CA
DA  - 1999-09-01 00:09:00
LA  - en
M1  - 570
PB  - Proc., Mat. Res. Soc. Symp. on Epitaxial Growth-Principles and Applications, San Francisco, CA
PY  - 1999
TI  - Multifunctional Optical In Situ Monitoring of Semiconductor Film Growth
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=24323
ER  -