TY - JOUR AU - Mehmet Ozgur AU - V. Milanovic AU - C. Zincke AU - Michael Gaitan AU - Mona Zaghloul C2 - IEEE Transactions on Microwave Theory and Techniques DA - 2000-05-05 00:05:00 LA - en PB - IEEE Transactions on Microwave Theory and Techniques PY - 2000 TI - Quasi-TEM Characteristic Impedance of Micromachined CMOS Coplanar Waveguides ER -