TY  - CONF
AU  - M. Doss
AU  - Deane Chandler-Horowitz
AU  - Jay Marchiando
AU  - S. Krause
AU  - S. Seraphin
C2  - Proc., Materials Research Society Symposium, Boston, MA, USA
DA  - 1991-12-31 00:12:00
LA  - en
M1  - 209
PB  - Proc., Materials Research Society Symposium, Boston, MA, USA
PY  - 1991
TI  - Analysis for the Characterization of Oxygen Implanted Silicon (SIMOX) by Spectroscopic Ellipsometry
ER  -