TY  - CONF
AU  - Doss, M.
AU  - Chandler-Horowitz, Deane
AU  - Marchiando, Jay
AU  - Krause, S.
AU  - Seraphin, S.
C2  - Proc., Materials Research Society Symposium, Boston, MA, USA
DA  - 1991-12-31 00:12:00
LA  - en
M1  - 209
PB  - Proc., Materials Research Society Symposium, Boston, MA, USA
PY  - 1991
TI  - Analysis for the Characterization of Oxygen Implanted Silicon (SIMOX) by Spectroscopic Ellipsometry
ER  -