TY  - CONF
AU  - Kristine Bertness
AU  - J Armstrong
AU  - Ryna Marinenko
AU  - Larry Robins
AU  - Albert Paul
AU  - Joseph Pellegrino
AU  - Paul Amirtharaj
AU  - Deane Chandler-Horowitz
C2  - Conf. Dig., LEOS Summer Topical on Optical Sensing in Semiconductor Manufacturing, Aventura, FL, USA
DA  - 2000-07-01 00:07:00
LA  - en
PB  - Conf. Dig., LEOS Summer Topical on Optical Sensing in Semiconductor Manufacturing, Aventura, FL, USA
PY  - 2000
TI  - AlGaAs Composition Measurements from In Situ Optical Reflectance
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26476
ER  -