TY  - CONF
AU  - J Lowney
AU  - Michael Postek
AU  - Andras Vladar
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control VIII, San Jose, CA, USA
DA  - 1994-12-31 00:12:00
LA  - en
M1  - 2196
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control VIII, San Jose, CA, USA
PY  - 1994
TI  - A Monte Carlo Model for SEM Linewidth Metrology
ER  -